A MEMS-Actuated Tunable Microdisk Resonator
نویسندگان
چکیده
A novel tunable microdisk resonator with integrated MEMS actuator to alter coupling gap is proposed and experimentally demonstrated for the first time. The fabricated device shows a transmittance change about 8dB and a quality factor of 6200.
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تاریخ انتشار 2004